Advanced coating method and materials to prevent hdp-cvd chamber arcing

ABSTRACT

Embodiments described herein relate to apparatus and coating methods to reduce chamber arcing, for example, in HDP-CVD, PECVD, PE-ALD and Etch chambers. The apparatus include a ring shaped gas distributor used for in-situ deposition of coating materials, and a process chamber including the same. The ring shaped gas distributor includes a ring shaped body having at least one gas entrance port disposed on a first side thereof and a plurality of gas distribution ports disposed on a first surface of the ring shaped body. The plurality of gas distribution ports are arranged in a plurality of evenly distributed rows. The plurality of gas distribution ports in a first row of the plurality of evenly distributed rows is adapted to direct gas at an exit angle different from an exit angle of the plurality of gas distribution ports in a second row of the plurality of evenly distributed rows.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims benefit of U.S. Provisional Patent ApplicationNo. 62/263,491, filed Dec. 4, 2015, and U.S. Provisional PatentApplication No. 62/299,790, filed Feb. 25, 2016, each of which is hereinincorporated by reference.

BACKGROUND

Field

Embodiments of the present disclosure generally relate to apparatusesand coating methods to reduce HDP-CVD chamber arcing.

Description of the Related Art

High-Density Plasma Chemical Vapor Deposition (HDP-CVD) employs aninductively coupled plasma source for generation of higher densityplasma at low vacuum pressures. The higher density plasma results insuperior gap fill performance, high quality film deposition at lowertemperatures, high throughput and easy serviceability. The reactordesign and process technology of HDP-CVD enables deposition of bothundoped and doped films for a wide range of applications, includingshallow trench isolation (STI), pre-metal dielectric layers (PMD),interlevel dielectric (ILD) layers, intermetal dielectric (IMD) layers,and passivation. Therefore, HDP-CVD is widely used in the semiconductorindustry.

Due to the low process pressure, one of the key issues reported inHDP-CVD chambers is chamber arcing. Arcing occurs when high concentratedE-field at a sharp point causes dielectric break down at the metallicchamber wall, gas ring and cathode body. The high discharge current,which takes place over a small area, vaporizes exposed metal andcontaminates substrate surfaces, resulting in decreased process yield.

Various techniques have been suggested to reduce chamber arcing. Forexample, an external coating method may be used on a new chamber,pre-installation. However, the coating must be reapplied when thepre-installation coating cracks during transportation, installation, ormaintenance, or once the coating layer becomes too thin. A seasoninglayer may be deposited on metallic chamber surfaces during seasoningoperations, after chamber cleaning, to alleviate the arcing. However,conventional seasoning layers provide insufficient coverage on chambercomponents, and thus, chamber arcing issues still exist.

Therefore, there is a need for improved apparatuses and coating methodsto reduce HDP-CVD chamber arcing.

SUMMARY

In one implementation, a ring shaped gas distributor is disclosed. Thering shaped gas distributor includes a ring shaped body having at leastone gas entrance port disposed on a first side thereof and a pluralityof gas distribution ports disposed on a first surface of the ring shapedbody. The plurality of gas distribution ports are arranged in aplurality of evenly distributed rows. A first gas distribution port ofthe plurality of gas distribution ports in a first row of the pluralityof evenly distributed rows is adapted to direct gas at an exit angledifferent from an exit angle of a second gas distribution port of theplurality of gas distribution ports in the first row of the plurality ofevenly distributed rows.

In another implementation, a process chamber is disclosed. The processchamber includes a chamber body and a dome lid assembly disposed on thechamber body, a substrate support positioned in the chamber body, a gasinlet mounted on the dome lid assembly, and a ring shaped gasdistributor. The ring shaped gas distributor includes a ring shaped bodyand a plurality of gas distribution ports disposed on a first surface ofthe ring shaped body.

In yet another implementation, a method is disclosed. The methodincludes flowing a first precursor into a process chamber through afirst gas inlet, ionizing the first precursor, flowing a secondprecursor into the process chamber through a ring shaped body adapted todistribute the second precursor, the second precursor being differentthan the first precursor, ionizing the second precursor, and depositinga seasoning material from the ionized second precursor on an internalsurface of the process chamber.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentdisclosure can be understood in detail, a more particular description ofthe disclosure, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlyexemplary embodiments and are therefore not to be considered limiting ofits scope, as the disclosure may admit to other equally effectiveembodiments.

FIG. 1 is a schematic view of a process chamber according to oneembodiment described herein.

FIG. 2 is a schematic view of a ring shaped gas distributor according toone embodiment described herein.

FIG. 3 illustrates is a flow diagram of a method according to oneembodiment described herein.

FIG. 4A is schematic view of a portion of a process chamber according toanother embodiment described herein.

FIG. 4B is a schematic, cross-sectional view of a ring shaped gasdistributor according to another embodiment described herein.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. It is contemplated that elements and features of oneembodiment may be beneficially incorporated in other embodiments withoutfurther recitation.

DETAILED DESCRIPTION

Embodiments described herein relate to apparatus and coating methods toreduce chamber arcing, for example, in HDP-CVD, PECVD, PE-ALD and Etchchambers. The apparatus include a ring shaped gas distributor suitablefor in-situ deposition of coating materials, and a process chamberincluding the same. The ring shaped gas distributor may include one ormore gas entrance ports, and plurality of gas distribution ports. Thering shaped gas distributor may be positioned in a lower portion of aprocess chamber, such as a plasma enhanced chemical vapor deposition(PECVD) chamber, to provide a precursor gas to the lower portion of theprocess chamber for deposition of a seasoning material. Embodimentsdescribed herein also include a method for seasoning a process chamber.The method includes flowing a first precursor into a process chamberthrough a first gas inlet, and flowing a seasoning precursor into theprocess chamber through a ring shaped gas distributor. The first andsecond precursor may be ionized and reacted to deposit a seasoningmaterial in the process chamber.

FIG. 1 is a schematic view a process chamber 100 according to oneembodiment described herein. In one example, the process chamber 100 maybe a high density plasma chemical vapor deposition (HDP-CVD) system. Theprocess chamber 100 includes a chamber body 116, a substrate support106, and a dome lid assembly 115 that includes a dome 102, an inductiveassembly 112 and a temperature control plate 110. The dome 102 ispositioned on the chamber body 116. The dome 102 and the chamber body116 define an internal volume of the process chamber 100. The substratesupport 106 is located within the internal volume of the process chamber100 and supports a substrate 190 thereon during processing. A substratesupport arm 108 is coupled to the substrate support 106 to facilitatesupport and actuation of the substrate support 106. An actuator 134 iscoupled to the substrate support arm 108 through bellows 136. Theactuator 134 vertically actuates the substrate support arm 108 andsubstrate support 106 coupled thereto to facilitate substrate transferbetween a substrate transfer robot (not shown) and the substrate support106 during a substrate transfer process.

The dome 102 defines an upper boundary of a plasma processing region 104located within the process chamber 100. The dome 102 may be made of aceramic dielectric material, such as aluminum, aluminum oxide oraluminum nitride. The lower boundary of the plasma processing region 104is defined by the upper surface of a substrate support 106. Duringprocessing, a plasma or other ionized gas may be generated within theplasma processing region 104 to facilitate processing of a substrate190. For example, a plasma may be generated in the plasma processingregion 104 to deposit a material on the substrate 190 in a HDP-CVD,plasma-enhanced chemical vapor deposition (PECVD) or plasma enhancedatomic layer deposition (PE-ALD) process.

An inductive assembly 112 including one or more inductive coils 114 ispositioned over the dome 102 to facilitate plasma generation in theplasma processing region 104. A power source (not shown) may be coupledto the inductive assembly 112 to provide power to the one or moreinductive coils 114. During operation, the plurality of inductive coils114 may provide radio frequency (RF) power to one or more precursor orprocess gases located within the plasma processing region 104 to ionizethe precursor or process gases. In one example, the plurality ofinductive coils 114 may provide up to 5,000 watts of RF power atnominally 2 MHz. The operating frequency of the plurality of inductivecoils 114 may be offset from the nominal operating frequency to improveplasma-generation efficiency. A temperature control plate 110 ispositioned over the inductive assembly 112 and is thermally coupled tothe dome 102 through the inductive assembly 112. The temperature controlplate 110 allows for control of the dome temperature within about ±10°C. over a range of about 100° C. to 200° C. The temperature controlplate 110 facilitates optimization of dome temperature for variousprocesses. In one example, a liquid coolant may flow through theinductive coils 114 to facilitate cooling of the inductive coils inaddition to or as an alternative to the temperature control provided bythe temperature control plate 110.

The process chamber 100 includes a gas panel 130 adapted to store one ormore precursor or process gases utilized during processing, such as aHDP-CVD, PECVD or PEALD process. The precursor or process gases may beintroduced to the plasma processing region 104 through one or more gasinlets 128 (two are shown as 128 a, 128 b), which are mounted to thedome lid assembly 115. The one or more gas inlets 128 a, 128 b arecoupled to the gas panel 130 through one or more gas supply lines 132(one of which is shown). In one embodiment, the one or more gas inlets128 may be configured as a single gas ring. In another embodiment, theone or more gas inlets 128 may be configured as a top baffle. A processgas, such as a precursor gas or other gas used during processing, orreacted byproducts thereof, may be exhausted from the process chamber100 by a pumping system 122. The pumping system 122 is joined to a lowerportion of the process chamber 100 and includes a throttle valve 124 anda pump 126. The throttle valve 124 couples the pump 126 to the chamberbody 116. The throttle valve 124 may be activated to control of chamberpressure by restricting the rate of exhaust flow exiting the processchamber 100 through the pump 126.

A ring shaped gas distributor 118 is positioned in the lower portion ofthe chamber body 116 between the throttle valve 124 and the substratesupport 106. The ring shaped gas distributor 118 includes a hollowtubular ring having one or more gas entrance ports and gas distributionports to distribute process or precursor gasses in a lower portion ofthe process chamber 100. The ring shaped gas distributor 118 may beattached to an internal surface 105 of the chamber body 116 by anattachment 120. The attachment 120 may be a spring-loaded clip, bracket,fastener, or the like. Precursor or process gases are supplied from asecond gas panel 140 to the ring shaped gas distributor 118 through agas supply line 138. The gas supply line 138 may be routed through thebellows 136 adjacent the substrate support arm 108. Alternatively, thegas supply line 138 may be routed through gas inlets 128 a, 128 b.

A process gas, such as a precursor gas or other gas used duringprocessing, is supplied to the ring shaped gas distributor 118 from thesecond gas panel 140 is distributed in the lower portion of the processchamber 100 to facilitate formation of a seasoning layer on the internalsurface 105 of the chamber body 116. The ring shaped gas distributor 118is adapted to evenly distribute gases into the lower portion of theprocess chamber 100 to form a more uniform seasoning layer thanconventional approaches, thus reducing the likelihood of undesiredarcing. The ring shaped gas distributor 118 may have a diameter that issmaller than the diameter of the internal surface 105 of the chamberbody 116. In one example, the ring shaped gas distributor may have adiameter that is about 3 percent to about 20 percent smaller than thediameter of the internal surface 105. The ring shaped gas distributor118 may be made of a metal, metal alloy, or a ceramic material. In oneembodiment, the ring shaped gas distributor 118 is made of the samematerial as the chamber body 116, so as to prevent metal contamination.In another embodiment, the ring shaped gas distributor 118 may be madeof aluminum oxide. In another embodiment, the ring shaped gasdistributor 118 may be made of aluminum nitride. In yet anotherembodiment, the ring shaped gas distributor 118 may be made of aluminum.

FIG. 2 is a schematic view of the ring shaped gas distributor 118. Thering shaped gas distributor 118 is a ring shaped gas distributor thatincludes a hollow ring shaped body 250 having two gas entrance ports 254a and 254 b disposed on opposite sides thereof and a plurality of gasdistribution ports 253 disposed on a first surface of the ring shapedbody 250. In one example, an upper half of the ring shaped body 250 mayinclude gas distribution ports 253 to direct gas upward to facilitateseasoning of the internal surface 105 of the process chamber 100 asshown in FIG. 1. In one embodiment, each of the plurality of gasdistribution ports 253 is about 0.5 millimeters (mm) to about 3 mm indiameter, such as about 1 mm in diameter.

The plurality of gas distribution ports 253 may be arranged in aplurality of rows 252 a, 252 b (two of which are labeled). Row 252 a mayrepresent a first row and row 252 b may represent a second row. Aplurality of rows may be evenly distributed in concentric circles aroundthe circumference of the body 250. Lines have been included between theports 253 of the rows 252 a and 252 b to show the distribution of therows in concentric circles. The ports 253 comprising each row may alsobe radially aligned with a centerline of the body 250. The plurality ofgas distribution ports 253 in the first row 252 a is positioned todirect exiting gas at an angle different from the exit angle of adjacentrows, such as the second row 252 b. In other words, each row of theplurality of gas distribution ports 252 is adapted to direct exiting gasat a different angle than adjacent rows. In another example, the gasdistribution ports 253 of a particular row may be grouped into triplets,with each gas distribution port of the triplet having a different gasexit angle. The three different angles may be repeated for each tripletof gas distribution ports 253 in a single row, such as row 252 a or row252 b. The variations in the exit angle between adjacent rows 252 a, 252b, or between adjacent gas distribution ports 253 may be controlled bythe diameter of the first surface of the gas distribution device 218.The relative difference of the exit angles may be between about 15degrees and about 30 degrees. In one embodiment, the spacing betweeneach gas distribution port 253 of the plurality of gas distributionports 253 is between about 1 centimeter (cm) and about 3 cm, such asabout 1 cm.

Although FIG. 2 illustrates one embodiment of a ring shaped gasdistributor 118, other embodiments are also contemplated. In anotherembodiment, the ring shaped gas distributor 118 may include more or lessthan two gas entrance ports 254 a, 254 b. In such an example, the gasentrance ports may be positioned at even intervals around the outercircumference of the ring shaped gas distributor 118. Additionally, itis contemplated that the gas distribution ports 253 may be unevenlydistributed to affect a gas flow within the process chamber 100. Also,the adjacent rows 252 a, 252 b may also be unevenly distributed. Theuneven distribution may compensate for non-symmetrical features of theprocess chamber 100, or differences in gas flow profiles within theprocess chamber 100. Moreover, while the gas distributor 118 isillustrated has having a ring-shaped body, it is contemplated that othershapes, such as elliptical, may be utilized to affect a gas flow withina process chamber.

FIG. 3 illustrates a flow diagram of a method 360 according to oneembodiment described herein. To facilitate understanding of embodimentsof the disclosure, FIG. 3 will be discussed in conjunction with FIG. 1.The method 360 may be utilized to deposit a seasoning material oninternal surfaces 105 of the process chamber 100. Method 360 begins atoperation 362. At operation 362, a processing gas, for example a firstprecursor, is introduced into the process chamber 100 through one orboth of the gas inlets 128 a or 128 b. The first precursor may be anoxygen precursor or a nitrogen precursor. Exemplary first precursorsinclude, but are not limited to, water (H₂O), ozone (O₃), oxygen (O2),nitrogen (N₂), and ammonia (NH₃). The first precursor is ionized atoperation 364. The ionized first precursor forms a monolayer on theinternal surface 105 of the process chamber 100.

At operation 366 a second precursor is introduced into the processchamber 100 through the ring shaped gas distributor 118. The introducedring shaped gas distributor 118 directs the precursors over portions ofthe chamber that are generally unreachable or poorly reached if thesecond precursor was solely introduced through the gas inlets 128 a, 128b disposed above the substrate support 106. The second precursormaterial may be an aluminum-containing precursor, or any othermetal-containing precursor. Exemplary second precursors include, but arenot limited to, trimethylaluminum (TMA) or aluminum chloride (AlCl₃).The second precursor is ionized in operation 368.

At operation 370, the ionized second precursor adsorbs to or reacts withthe monolayer of the first precursor formed on the internal surface 105.Absorption or reaction of the second monolayer results in formation of aseasoning material on the internal surface 105 of the chamber body 116of the process chamber 100. The seasoning material may include anydielectric material that has one or more of the follow characteristics:(1) high breakdown voltage, such as more than 7 MV/cm, (2) is resistantto fluorine (F) radicals, (3) minimal particle contamination concern, or(4) minimal metal contamination concern. In one embodiment, theseasoning material is aluminum oxide (Al₂O₃). In another embodiment, theseasoning material is aluminum nitride (AlN). The seasoning material maybe deposited to a thickness that prevents arcing, for example, betweenabout 0.1 microns to about 10 microns, such as about 1 micron to about 3microns. In one example, method 360 may be an ALD process, and theseasoning material may be deposited at a thickness of about 5 angstromsto about 10 angstroms per deposition cycle. In such an example,operations 362-370 are repeated until a seasoning material of apreferred thickness is formed.

The method 360 may be a PECVD or PE-ALD process, in one example. In aPE-ALD process, radicals are generated by an HDP RF source. PE-ALDoccurs at relatively low temperatures, which are below the relative lowtemperature limit (<100° C.) of the chamber wall or other chambercomponents. The method 360 may take place during preventativemaintenance, corrective maintenance, or as otherwise needed to make sureall metallic parts, such as the chamber body, are sufficiently coated tosubstantially prevent chamber arcing. In one example, the method 360 mayoccur subsequent to a thin film formation process in which a thin filmis formed on the substrate 190.

FIG. 4A is schematic view of a portion of a process chamber 480according to another embodiment described herein. The process chamber480 is substantially similar to the process chamber 100, but includes aring shaped gas distributor 418 instead of the ring shaped gasdistributor 118. The gas distributor 418 is coupled to the chamber body116. The gas distributor 418 includes tapered outer sidewalls to engagethe internal surface 105 of the chamber body 116. In one example, thediameter of the outer sidewall of the gas distributor 418 is larger at atop portion thereof compared to a lower portion thereof. The degree oftaper of the sidewall of the gas distributor 418 may be selected to bethe same or similar to the taper of the internal surface 105. In such anexample, the gas distributor 418 may be maintained in position via awedge fit, and thus facilitating quick maintenance or exchange of thegas distributor 418. Precursor or process gases are supplied to the ringshaped gas distributor 418 through a gas supply line 138, whichinteracts with at least one gas entrance port disposed on the gasdistributor 418. It is contemplated that more than one gas supply line138 may be utilized.

FIG. 4B is a schematic, cross-sectional view of the ring shaped gasdistributor 418 according to one embodiment. The ring shaped gasdistributor 418 has a ring shaped gas distribution body 450. The ringshaped gas distribution body 450 includes a first, curved surface 456and a second, flat surface 458. A plurality of gas distribution 453 a,453 b, and 453 c (three are shown), are disposed on the first, curvedsurface 456 of the ring shaped gas distribution body 450 and are adaptedto direct process gas to locations within a process chamber. The first,curved surface 456 of the ring shaped gas distribution body 450 ispositioned opposite the second, flat surface 458, which engages thechamber body 116. The second, flat surface 458 has a height 459 ofbetween about 5 mm and about 30 mm. In one example, the first, curvedsurface 456 of the ring shaped gas distribution body 450 may include gasdistribution ports 453 a, 453 b, 453 c to direct gas inwards tofacilitate seasoning of the internal surface 105 of the chamber 480 asshown in FIG. 4A. In one embodiment, each of the plurality of gasdistribution ports 453 a, 453 b, 453 c is about 0.5 mm to about 3 mm indiameter, such as about 1 mm in diameter.

The plurality of gas distribution ports 453 a, 453 b, 453 c may bearranged in a plurality of rows. The rows may be evenly distributedaround the ring shaped gas body 450, for example, across the first,curved surface 456. The gas distribution ports 453 a, 453 b, and 453 cof FIG. 4B may be configured in a first row. The first gas distributionport 453 a is positioned to direct exiting gas at an angle differentfrom the second gas distribution port 453 b. The third gas distributionport 453 c may also be positioned to direct exiting gas at an angledifferent from the second gas distribution port 453 b and different fromthe first port 453 a. Furthermore, in another example, each row of theplurality of gas distribution ports 453 a, 453 b, 453 c may be adaptedto direct exiting gas at a different angle than adjacent rows. Thevariations in the exit angle between gas distribution ports 453 a, 453b, 453 c may be controlled by the diameter of the first, curved surface456 of the gas distributor 418. The relative difference of the exitangles between adjacent gas distribution ports 453 a, 453 b, 453 c maybe between about 15 degrees and about 30 degrees. In one embodiment, thespacing between adjacent gas distribution ports 453 a, 453 b, 453 c maybe between about 1 cm and about 3 cm, such as about 1 cm.

Benefits of the disclosure include the reduction of chamber arcing andarcing related defects, as well as increased chamber longevity anddecreased maintenance costs through deposition of a seasoning materialin portions of the chamber that are susceptible to arcing.

While the description herein has made reference to an HDP-CVD chamber,it is to be understood that the disclosures herein are applicable toother semiconductor equipment tools as well, such as PECVD processchambers, etch process chambers and PE-ALD process chambers.

While the foregoing is directed to embodiments of the presentdisclosure, other and further embodiments of the disclosure may bedevised without departing from the basic scope thereof, and the scopethereof is determined by the claims that follow.

1. A ring shaped gas distributor, comprising: a ring shaped body havingat least one gas entrance port disposed on a first side thereof; and aplurality of gas distribution ports disposed on a first surface of thering shaped body, wherein the plurality of gas distribution ports arearranged in a plurality of evenly distributed rows, and wherein theplurality of gas distribution ports in a first row of the plurality ofevenly distributed rows is adapted to direct gas at an exit angledifferent from an exit angle of the plurality of gas distribution portsin a second row of the plurality of evenly distributed rows.
 2. The ringshaped gas distributor of claim 1, wherein the first surface of the ringshaped body is curved.
 3. The ring shaped gas distributor of claim 2,wherein a second surface of the ring shaped body is flat.
 4. The ringshaped gas distributor of claim 1, wherein the ring shaped bodycomprises a material selected from the group consisting of aluminum,aluminum oxide, and aluminum nitride.
 5. The ring shaped gas distributorof claim 1, wherein each of the plurality of gas distribution ports hasa diameter of between about 0.5 millimeters and about 3 millimeters. 6.The process chamber of claim 1, wherein the plurality of evenlydistributed rows are spaced apart by about 1 centimeter to about 3centimeters.
 7. A process chamber, comprising: a chamber body; a domelid assembly disposed on the chamber body; a gas inlet mounted on thedome lid assembly; a substrate support positioned in the chamber body; agas inlet mounted on the dome lid assembly; and a ring shaped gasdistributor positioned beneath the substrate support, wherein the ringshaped gas distributor comprises: a ring shaped body; and a plurality ofgas distribution ports disposed on a first surface of the ring shapedbody.
 8. The process chamber of claim 7, wherein the ring shaped bodycomprises aluminum.
 9. The process chamber of claim 7, wherein each ofthe plurality of gas distribution ports of the ring shaped gasdistributor has a diameter of between about 0.5 millimeters and about 3millimeters.
 10. The process chamber of claim 7, wherein the pluralityof evenly distributed rows are spaced apart by about 1 centimeter toabout 3 centimeters.
 11. The process chamber of claim 7, wherein thering shaped body is coupled to the chamber body.
 12. The process chamberof claim 7, further comprising at least one gas entrance port, whereinthe gas entrance port is disposed on a first side of the ring shapedbody.
 13. A method, comprising: flowing a first precursor into a processchamber through a first gas inlet; ionizing the first precursor; flowinga second precursor into the process chamber through a ring shaped bodyadapted to distribute the second precursor, the second precursor beingdifferent than the first precursor; ionizing the second precursor; anddepositing a seasoning material from the ionized first precursor and theionized second precursor on an internal surface of the process chamber.14. The method of claim 13, wherein the first precursor comprises H₂O,ozone, or oxygen.
 15. The method of claim 13, wherein the firstprecursor comprises N₂ or NH₃.
 16. The method of claim 13, wherein thesecond precursor is a metal-containing precursor.
 17. The method ofclaim 13, wherein the second precursor comprises trimethylaluminum orAlCl₃.
 18. The method of claim 13, wherein the seasoning material isAl₂O₃.
 19. The method of claim 13, wherein the seasoning material isAlN.
 20. The method of claim 13, wherein the seasoning material isdeposited to a thickness of about 0.1 microns to about 10 microns.